Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 5: Characterization, Parameter Extraction, Calibration

Analysis and Characterization of Laterally Induced Electrostatic Repulsive Forces

Authors:K.B. Lee and Y-H Cho
Affilation:Korea Advanced Institute of Science and Technology, KR
Pages:218 - 221
Keywords:repulsive force, electrostatic actuation, finite element simulation, electrostatic field
Abstract:We analyze and characterize the laterally induced electrostatic repulsive force generated by the in-plane asymmetry of electrostatic field. Basic concept of the electrostatic repulsive actuation is presented. Fundamental nature of the repulsive force has been characterized by the finite element analysis of the electrostatic field for varying electrode geometry. A simple analytic force curve has been derived from the fittina of the finite element results. The theoretical simulation results are compared well with the experimental values, measured from the microfabricated test structures: thereby demonstrating $he validity and usefulness of the analytic formulae derived from the finite element simulation.
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