MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 5

Analysis and Characterization of Laterally Induced Electrostatic Repulsive Forces

Authors: K.B. Lee and Y-H Cho

Affilation: Korea Advanced Institute of Science and Technology, Korea

Pages: 218 - 221

Keywords: repulsive force, electrostatic actuation, finite element simulation, electrostatic field

Abstract:
We analyze and characterize the laterally induced electrostatic repulsive force generated by the in-plane asymmetry of electrostatic field. Basic concept of the electrostatic repulsive actuation is presented. Fundamental nature of the repulsive force has been characterized by the finite element analysis of the electrostatic field for varying electrode geometry. A simple analytic force curve has been derived from the fittina of the finite element results. The theoretical simulation results are compared well with the experimental values, measured from the microfabricated test structures: thereby demonstrating $he validity and usefulness of the analytic formulae derived from the finite element simulation.

Analysis and Characterization of Laterally Induced Electrostatic Repulsive Forces

ISBN: 0-96661-35-0-3
Pages: 678