Authors: K.B. Lee and Y-H Cho
Affilation: Korea Advanced Institute of Science and Technology, Korea
Pages: 218 - 221
Keywords: repulsive force, electrostatic actuation, finite element simulation, electrostatic field
We analyze and characterize the laterally induced electrostatic repulsive force generated by the in-plane asymmetry of electrostatic field. Basic concept of the electrostatic repulsive actuation is presented. Fundamental nature of the repulsive force has been characterized by the finite element analysis of the electrostatic field for varying electrode geometry. A simple analytic force curve has been derived from the fittina of the finite element results. The theoretical simulation results are compared well with the experimental values, measured from the microfabricated test structures: thereby demonstrating $he validity and usefulness of the analytic formulae derived from the finite element simulation.