Authors: Y. Granik and V. Moroz
Affilation: PDF Solutions, Inc., United States
Pages: 205 - 208
Keywords: TCAD, RSM, device, process, optimization
Conventional polynomial Response Surface Methodology (RSM) fails to provide oscillation-free analytical models for some device data with singularity like subthreshold slope vs threshold adjustment dose, poly gate length vs stepper defocus, etc. New type of RSM model is proposed in form of rational polynomials which are generalization of the conventional polynomials. This approach delivers oscillation-free RSM surfaces and intuitive interpretation of the data.