Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
 
Chapter 5: Characterization, Parameter Extraction, Calibration
 

Rational RSM Models for Device Characteristics as Functions of Process Parameters

Authors:Y. Granik and V. Moroz
Affilation:PDF Solutions, Inc., US
Pages:205 - 208
Keywords:TCAD, RSM, device, process, optimization
Abstract:Conventional polynomial Response Surface Methodology (RSM) fails to provide oscillation-free analytical models for some device data with singularity like subthreshold slope vs threshold adjustment dose, poly gate length vs stepper defocus, etc. New type of RSM model is proposed in form of rational polynomials which are generalization of the conventional polynomials. This approach delivers oscillation-free RSM surfaces and intuitive interpretation of the data.
Rational RSM Models for Device Characteristics as Functions of Process ParametersView PDF of paper
ISBN:0-96661-35-0-3
Pages:678
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