Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
 
Chapter 5: Characterization, Parameter Extraction, Calibration
 

Characterization of Electrostatically-Actuated Beams Through Capacitance-Voltage Measurements and Simulations

Authors:E.K. Chan, K. Garikipati, Z.K. Hsiau and R.W. Dutton
Affilation:Stanford University, US
Pages:180 - 185
Keywords:electrostatically-actuated beams, capacitancevoltage, contact, simulation accuracy
Abstract:Detailed 2D electromechanical simulations of electrostatically-actuated beams reveal phenomena not captured by 1D or quasi-2D simulations. The behavior of the beam when in contact with a dielectric layer is studied. Capacitance-voltage measurements are used to extract material properties and explore surface phenomena such as charge accumulation, stiction and surface roughness. Monte Carlo simulations reveal the limits of simulation accuracy due to statistical distributions of input parameters.
Characterization of Electrostatically-Actuated Beams Through Capacitance-Voltage Measurements and SimulationsView PDF of paper
ISBN:0-96661-35-0-3
Pages:678
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