MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 5

Microelectromechanical Systems (MEMS) Design and Design Automation Research Projects at Duke University
A. Dewey and R.B. Fair
Duke University, US

Characterization of Electrostatically-Actuated Beams Through Capacitance-Voltage Measurements and Simulations
E.K. Chan, K. Garikipati, Z.K. Hsiau and R.W. Dutton
Stanford University, US

1/f Noise Characterization of a Surface-Micromachined Suspended Gate FET
H. Fu, M.L. Kniffin, G. Watanabe, M.P. Masquelier and J. Whitfield
Motorola, Inc., US

Fast Inductance Extraction of 3-D Structures with Non-Constant Permeabilities
Y. Massoud and J.K. White
Massachusetts Institute of Technology, US

Augmented Reality as an Interactive Tool for Microscopic Imaging, Measurement and Model Based Verification of Simulated Parts
A. Sulzmann, C. Schütz, H. Hügli and J. Jacot
EPFL, CH

Simple Method of Characterizing CMOS Channel Dopant Profiles Using CV Technique
D. Kapila, M. Kulkarni, C. Fernando, J. Davis, K. Vasanth and G. Pollack
Texas Instruments, Inc., US

Rational RSM Models for Device Characteristics as Functions of Process Parameters
Y. Granik and V. Moroz
PDF Solutions, Inc., US

Methodology for Calibrating Process and Device Simulators by Extracting Model Parameters from Electrical Data
H-M Ho, Y. Zu, K.V. Loiko and D.H.Y. Lim
Chartered Semiconductor Manufacturing Ltd., SG

Validation and Calibration of Electrothermal Device Models Using Infrared Laser Probing Techniques
R. Thalhammer, C. Fürböck, N. Seliger, E. Gornik and G. Wachutka
Technical University of Münich, DE

Analysis and Characterization of Laterally Induced Electrostatic Repulsive Forces
K.B. Lee and Y-H Cho
Korea Advanced Institute of Science and Technology, KR

Inductance Extraction by Means of the Monte Carlo Method
G. Leonhardt, C. Hager, P. Regli, W. Fichtner
ETH-EPFL, CH


ISBN: 0-96661-35-0-3
Pages: 678

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