Extraction of Dynamic HDL-A Models of Thermally Based Microsystems from Physical Simulations

	MSM 98 Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems Chapter 4: Thermo-Mechanical Modeling
	Extraction of Dynamic HDL-A Models of Thermally Based Microsystems from Physical Simulations
Authors:	S. Marco, M. Carmona and J. Samitier
Affilation:	Universitat de Barcelona, ES
Pages:	157 - 162
Keywords:	HDL, themal models, model order reduction
Abstract:	While analyzing the behaviour of complex systems it is not practical to carry out the simulation of the complete model a the physical level In order to move from simulations at tne physical level towards system modeling with more abstract representations. it is sometimes necessary to use lumped representations of a initially continuous system. Some of these lumped elements will be represented by a black-box model defined by a certain transfer function. This work addresses the problem of the identification of a continuous syster, namely a thermo-pneumatic microacruator. from irs ransient behavior as obtained from finite element modeling The influence of the integration algorithms is studied and a solunon is proposed to avoid its influence in the extracted transfer function. The final representation of the system is used in the simulation of a micropump by using an electronic simulator.
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ISBN:	0-96661-35-0-3
Pages:	678
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