Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 4: Thermo-Mechanical Modeling

A Least Squares Algorithm for Optimal Heater Placement in Microsensors

Authors:C.C. Liu, P.F. Man and C.H. Mastrangelo
Affilation:University of Michigan, US
Pages:151 - 156
Keywords:least square optimization, microsensor, microchamber
Abstract:In this paper we present an algorithm that yields the optimal placement of a finite number of constant power density heaters for an arbitrary desired temperature profile. Using this algorithm, the volume efficiency (the percentage of volume heated within target temperature) can be optimized using different number of heaters. For an example heating chamber, the optimized heater placement method yields 76% volume efficiency using three heaters which is close to the ultimate volume efficiency of 84 %. This is a three-fold improvement over the 26% volume efficiency achievable using a single heater. The performance of the algorithm and the resulting improvements in temperature uniformity were determined experimentally using a thermal imaging microscope.
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