Authors: A. Kolpekwar, C Kellen and R.D. Blanton
Affilation: Carnegie Mellon University, United States
Pages: 111 - 116
Keywords: fault modeling, MEMS testing, inductive fault analysis, fault diagnosis
Most MEMS applications demand extraordinary levels of product reliability. This results in the need to design a comprehensive testing methodology for MEMS. Effectiveness of any testing methodology depends on the accuracy of fault models utilized. Our goal in this work is to systematically generate fault models for microelectromechanical systems. We have developed a tool called CARAMEL (Contarnination and Reliability Analysis for Microelectromechanical Layout) that performs inductive fault analysis of MEMS. This facilitates studying a large spectrum of MEMS faulty behavior that leads to the generation of MEMS fault models. Here, we describe CARAMEL and its use in perforrning contamination analysis of MEMS. The effectiveness of CAR AMEL is illustrated by the generation of defective threedimensional micromechanical structures caused by process contaminations.