Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 14: Applications: Hall Effect, Storage

Analytical Study of Vertical Hall (VH)-Devices Using an Adapted Conform Mapping Technique

Authors:P.A. Besse, C. Schott and R.S. Popovic
Affilation:EPFL, CH
Pages:660 - 665
Keywords:magnetic sensor, Hall-devices, conform mapping, geometry factor, series resistance
Abstract:We adapt the conforrn mapping technique to the analytical calculation of two dimensional vertical Hall (VH)-devices with five electrical contacts. With our new method the finite size of the two output current electrodes is taken into account. The mapping technique has been extended to VHdevices embeded in a well or in a guard-ring. Different cases, all based on a typical VH-device, have been studied to illustrate the potentialities of the method. We calculate the geometry factor, the series resistance as well as the current unbalan: between both output current electrodes. Such accurate alculations are especially requirec in order to understanl the efficient linearization schemes recently developed for such VH-devices.
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