Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 13: Applications: Optics, Electromagnetics

Simulation of Grating Light Valves

Authors:E. Furlani
Affilation:Eastman Kodak Co., US
Pages:614 - 618
Keywords:grating light valve, microbeam deflection, MEMS simulation, electrostatic analysis, finite element analysis.
Abstract:The Grating Light Valve (GLV) is a microelectromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In this paper we discuss a method for simulating GLVs. This method entails the solution of a nonlinear fourth-order beam equation with a forcing function, which is based on a parallelplate capacitor model. We examine the accuracy of the force model using 2D finite element analysis (FEA). We show that this model renders force values that are within 90% of the FEA values. We also compute microbeam deflection profiles and switching voltages, and demonstrate that rigorous GLV simulations can be performed in a few minutes on a personal computer.
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