MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Applications: Optics, Electromagnetics Chapter 13

Opto-Electro-Mechanical model for MOEMS

Authors: G. Jacquemod, K. Vuorinen, F. Gaffiot, A. Spisser, C. Seassal, J-L Leclercq, P Rojo-Romeo, P. Viktorovitch, J-P Laine, R. Ledantec and T. Benyattou

Affilation: Ecole Centrale de Lyon, France

Pages: 608 - 613

Keywords: MOEMS, optical filter, Hardware Descripffon Languages, behavioral modeling, WDM

A highly selective and widely tunable optical filter based on MOEMS technology at 1.55 gm using a Fabry-Perot resonator with micromachined InP-air gap distributed Bragg reflectors has been designed and fabricated in our laboratory. The minimum resonance Full Width at Half Maximum (FWHM), as measured by micro-reflecffvity experiments, is close to 0.4 nm (around 1.55 1lm) and the continuous tuning range is around 60 nm for a bias voltage of 14 V. In order to study the global characterisffcs of this device, an opto-electro-mechanical behavioral model has been developed. The model, written in VHDL-AMS-like Hardware Description Language, allows a combined simulaffon of opffcal, electrical and mechanical behavior of the tunable opffcal filter in a mixedsignal electronics design framework. Moreover, the use of Hardware Descripffon Language allows an integration of the model in a system simulation context.

Opto-Electro-Mechanical model for MOEMS

ISBN: 0-96661-35-0-3
Pages: 678