MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Applications: Pressure, Actuation, Navigation Chapter 12

Finite Element Analysis of MEMS Diaphragm Valves

Authors: F. Yang and I. Kao

Affilation: SUNY-Stony Brook, United States

Pages: 591 - 596

Keywords: MEMS valve, plate theory, critical load, finite element analysis

Based on simple plate theory, the deflection of MEMS microvalve is studied analytically and numerically. The critical load to initially drive the microvalve is found to be proportional to the pre-deflection of microdiaphragm. The microdiaphragm becomes stiffer when either central pedestal or the diaphragm thickness increases. These decrease the deformation ability of the microdiaphragm, which in turn reduce the possibility of in-use stiction. The finite element results show that stress concentration around the corner of the central pedestal and the step occurs, which may result in local mechanical failure and influence the lifetime of the microsystems.

Finite Element Analysis of MEMS Diaphragm Valves

ISBN: 0-96661-35-0-3
Pages: 678