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 | MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 12: Applications: Pressure, Actuation, Navigation |
| | An Integrated Pressure Sensor with High Performance | | Authors: | B.N. Lee, K.N. Kim, H.D. Park and S-M Shin | | Affilation: | Korea Electronics Technology Institute, Korea | | Pages: | 575 - 579 | | Keywords: | pressure sensor. calibration, temperature compensation, ion-implanted resistors | | Abstract: | A bipolar integrated pressure sensor had been designed and simulated. The ion-implanted resistors with temperature coeffcient of 1700pm/?C and 4700ppm/?C were used for calibration and temperature compensation. Ion-implanted resistors are simultaneouslv fabricated with base and piezoresistors. Simulation results of designed pressure sensor showed that maximum stress was l:90kPa and maximum deflection was 4.95x lO,m. The pressure sensitivitv was 240V/V.kPa. Simulation results of calibrated and temperature compensated circuits showed that the offset voltage was 0.4V at 10kPa and full scale span was 4.6:V at llkPa. The temperature coefficient of full scale span was 46 ppm/?C at the temperature range of -10 to 70oC. |  | View paper | | ISBN: | 0-96661-35-0-3 |
| Pages: | 678 |
| Hardcopy: | $100.00 |
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