Authors: J.J. Allen, S.L. Miller, G.F. LaVigne, M.S. Rodgers and W.P. Eaton
Affilation: Sandia National Laboratories, United States
Pages: 569 - 574
Keywords: dynamic, linkage, joints, electrostatic, microengines, MEMS
The electrostatic microengine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must be fully understood. One of the major trade-offs in the microengine design is the use of either pin or flexure joints. This paper will develop the equations of motion for flexurejointed and pinjointed surface micromachined microengines. An analytical mechanics approach will be used to derive the equations of motion and the appropriate equations of constraint. The effect of the flexure joints on the drive signals of the micro engine is experimentally shown to be significant during static tests.