MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Applications: Pressure, Actuation, Navigation Chapter 12

On the Vibrations of a MEMS Gyroscope

Authors: W.O. Davis and A.P. Pisano

Affilation: UC-Berkeley, United States

Pages: 557 - 562

Keywords: Gyroscope, rate sensor, beam vibration.

In this paper, the dynamics of a dual-axis MEMS gyroscope are examined. The model for the device is based on a non-linear rod theory developed by A. E. Green, P. M. Naghdi and several co-workers. A preliminary analysis of the model, which presumes certam symmetries and small deformations, is used to examine three particular modes of operation of the device. These modes are the sensor's drive mode, tilt mode, and bomce mode. Such an analysis is a necessary precursor to the more difficult task of analyzing the effects of design imperfections on the dynamics of this device.

On the Vibrations of a MEMS Gyroscope

ISBN: 0-96661-35-0-3
Pages: 678