Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 12: Applications: Pressure, Actuation, Navigation

Hierarchical Representation and Simulation of Micromachined Inertial Sensors

Authors:J.E. Vandemeer, M.S. Kranz and G.K. Fedder
Affilation:Carnegie Mellon University, US
Pages:540 - 545
Keywords:nodal simulation, lumped-parameter modeling, inertial sensors.
Abstract:A circuit-level methodology for simulating micromachined inertial sensors based on a hierarchical representation of microelectromechanical systems (MEMS) is presented. In the NODAS methodology 2dal Design of Actuators and Sensors), microaccelerometers and microgyroscopes are designed as netlists of general-purpose micromechanical beams, plates, electrostatic gaps, joints, and anchors and evaluated using lumped-parameter behavioral models. The on-chip displacements and global position of each micromechanical element have been separated in the netlist, enabling application of translation and rotation of the chip while simultaneously providing access to on-chip displacements for position sensing and electrostatic actuation. Simulations of static displacements and modal frequencies of a cantilever beam, a crab-leg accelerometer, and a symmetric vibratory-rate gyroscope agree to within 2% o finite-element analysis when using the minimal number of elements. Simulation of a 16 kHz vibratory-rate gyroscope system with dual transresistance sense amplifiers illustrates the ability to perfomm systemlevel mixed-domain simulation.
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