MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Applications: Pressure, Actuation, Navigation Chapter 12

Hierarchical Representation and Simulation of Micromachined Inertial Sensors
J.E. Vandemeer, M.S. Kranz and G.K. Fedder
Carnegie Mellon University, US

Modeling and Characterization of an Integrated FET Accelerometer
M.L. Kniffin, T.G. Wiegele, M.P. Masquelier, H. Fu, J. Whitfield
Motorola, Inc., US

Micromachined Accelerometer Design, Modeling and Validation
B.R. Davies, V.I. Bateman, F.A. Brown, S. Montague, J.R. Murray, D. Rey and J.H. Smith
Sandia National Laboratories, US

On the Vibrations of a MEMS Gyroscope
W.O. Davis and A.P. Pisano
UC-Berkeley, US

Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm
J.H. Correia, M. Bartek and R.F. Wolffenbuttel
Delft University of Technology, LN

Dynamic Effects of Linkage Joints in Electrostatic Microengines
J.J. Allen, S.L. Miller, G.F. LaVigne, M.S. Rodgers and W.P. Eaton
Sandia National Laboratories, US

An Integrated Pressure Sensor with High Performance
B.N. Lee, K.N. Kim, H.D. Park and S-M Shin
Korea Electronics Technology Institute, KR

Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives
W. Ye and S. Mukherjee
Cornell University, US

Simulation of Silicon Piezoresistive Sensors
K. Matsuda and Y. Kanda
Toyo University, JP

Finite Element Analysis of MEMS Diaphragm Valves
F. Yang and I. Kao
SUNY-Stony Brook, US

Robust Design of Silicon Piezoresistive Pressure Sensors
T-K Shing
Industrial Technology Research Institute, TW

Microsteping Control of Hybrid Stepper Motor Using Fuzzy Logic for Robotics Application
A.Z. Mohamed, A.M. Zaki
Electronics Research Inst., EG


ISBN: 0-96661-35-0-3
Pages: 678