 | MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 12: Applications: Pressure, Actuation, Navigation |
| - | Hierarchical Representation and Simulation of Micromachined Inertial Sensors |
| | J.E. Vandemeer, M.S. Kranz and G.K. Fedder |
| | Carnegie Mellon University, U.S.A. |
| - | Modeling and Characterization of an Integrated FET Accelerometer |
| | M.L. Kniffin, T.G. Wiegele, M.P. Masquelier, H. Fu, J. Whitfield |
| | Motorola, Inc., U.S.A. |
| - | Micromachined Accelerometer Design, Modeling and Validation |
| | B.R. Davies, V.I. Bateman, F.A. Brown, S. Montague, J.R. Murray, D. Rey and J.H. Smith |
| | Sandia National Laboratories, U.S.A. |
| - | On the Vibrations of a MEMS Gyroscope |
| | W.O. Davis and A.P. Pisano |
| | UC-Berkeley, U.S.A. |
| - | Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm |
| | J.H. Correia, M. Bartek and R.F. Wolffenbuttel |
| | Delft University of Technology, The Netherlands |
| - | Dynamic Effects of Linkage Joints in Electrostatic Microengines |
| | J.J. Allen, S.L. Miller, G.F. LaVigne, M.S. Rodgers and W.P. Eaton |
| | Sandia National Laboratories, U.S.A. |
| - | An Integrated Pressure Sensor with High Performance |
| | B.N. Lee, K.N. Kim, H.D. Park and S-M Shin |
| | Korea Electronics Technology Institute, Korea |
| - | Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives |
| | W. Ye and S. Mukherjee |
| | Cornell University, U.S.A. |
| - | Simulation of Silicon Piezoresistive Sensors |
| | K. Matsuda and Y. Kanda |
| | Toyo University, Japan |
| - | Finite Element Analysis of MEMS Diaphragm Valves |
| | F. Yang and I. Kao |
| | SUNY-Stony Brook, U.S.A. |
| - | Robust Design of Silicon Piezoresistive Pressure Sensors |
| | T-K Shing |
| | Industrial Technology Research Institute, Taiwan |
| - | Microsteping Control of Hybrid Stepper Motor Using Fuzzy Logic for Robotics Application |
| | A.Z. Mohamed, A.M. Zaki |
| | Electronics Research Inst., Egypt |
| ISBN: | 0-96661-35-0-3 |
| Pages: | 678 |
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