Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Chapter 12:

Applications: Pressure, Actuation, Navigation

-Hierarchical Representation and Simulation of Micromachined Inertial Sensors
 J.E. Vandemeer, M.S. Kranz and G.K. Fedder
 Carnegie Mellon University, US
-Modeling and Characterization of an Integrated FET Accelerometer
 M.L. Kniffin, T.G. Wiegele, M.P. Masquelier, H. Fu, J. Whitfield
 Motorola, Inc., US
-Micromachined Accelerometer Design, Modeling and Validation
 B.R. Davies, V.I. Bateman, F.A. Brown, S. Montague, J.R. Murray, D. Rey and J.H. Smith
 Sandia National Laboratories, US
-On the Vibrations of a MEMS Gyroscope
 W.O. Davis and A.P. Pisano
 UC-Berkeley, US
-Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm
 J.H. Correia, M. Bartek and R.F. Wolffenbuttel
 Delft University of Technology, LN
-Dynamic Effects of Linkage Joints in Electrostatic Microengines
 J.J. Allen, S.L. Miller, G.F. LaVigne, M.S. Rodgers and W.P. Eaton
 Sandia National Laboratories, US
-An Integrated Pressure Sensor with High Performance
 B.N. Lee, K.N. Kim, H.D. Park and S-M Shin
 Korea Electronics Technology Institute, KR
-Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives
 W. Ye and S. Mukherjee
 Cornell University, US
-Simulation of Silicon Piezoresistive Sensors
 K. Matsuda and Y. Kanda
 Toyo University, JP
-Finite Element Analysis of MEMS Diaphragm Valves
 F. Yang and I. Kao
 SUNY-Stony Brook, US
-Robust Design of Silicon Piezoresistive Pressure Sensors
 T-K Shing
 Industrial Technology Research Institute, TW
-Microsteping Control of Hybrid Stepper Motor Using Fuzzy Logic for Robotics Application
 A.Z. Mohamed, A.M. Zaki
 Electronics Research Inst., EG
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