Applications: Pressure, Actuation, Navigation

	MSM 98 Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems Chapter 12: Applications: Pressure, Actuation, Navigation
-	Hierarchical Representation and Simulation of Micromachined Inertial Sensors
	J.E. Vandemeer, M.S. Kranz and G.K. Fedder
	Carnegie Mellon University, U.S.A.
-	Modeling and Characterization of an Integrated FET Accelerometer
	M.L. Kniffin, T.G. Wiegele, M.P. Masquelier, H. Fu, J. Whitfield
	Motorola, Inc., U.S.A.
-	Micromachined Accelerometer Design, Modeling and Validation
	B.R. Davies, V.I. Bateman, F.A. Brown, S. Montague, J.R. Murray, D. Rey and J.H. Smith
	Sandia National Laboratories, U.S.A.
-	On the Vibrations of a MEMS Gyroscope
	W.O. Davis and A.P. Pisano
	UC-Berkeley, U.S.A.
-	Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm
	J.H. Correia, M. Bartek and R.F. Wolffenbuttel
	Delft University of Technology, The Netherlands
-	Dynamic Effects of Linkage Joints in Electrostatic Microengines
	J.J. Allen, S.L. Miller, G.F. LaVigne, M.S. Rodgers and W.P. Eaton
	Sandia National Laboratories, U.S.A.
-	An Integrated Pressure Sensor with High Performance
	B.N. Lee, K.N. Kim, H.D. Park and S-M Shin
	Korea Electronics Technology Institute, Korea
-	Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives
	W. Ye and S. Mukherjee
	Cornell University, U.S.A.
-	Simulation of Silicon Piezoresistive Sensors
	K. Matsuda and Y. Kanda
	Toyo University, Japan
-	Finite Element Analysis of MEMS Diaphragm Valves
	F. Yang and I. Kao
	SUNY-Stony Brook, U.S.A.
-	Robust Design of Silicon Piezoresistive Pressure Sensors
	T-K Shing
	Industrial Technology Research Institute, Taiwan
-	Microsteping Control of Hybrid Stepper Motor Using Fuzzy Logic for Robotics Application
	A.Z. Mohamed, A.M. Zaki
	Electronics Research Inst., Egypt
ISBN:	0-96661-35-0-3
Pages:	678
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