 | MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 12: Applications: Pressure, Actuation, Navigation |
| - | Hierarchical Representation and Simulation of Micromachined Inertial Sensors |
| J.E. Vandemeer, M.S. Kranz and G.K. Fedder | |
| Carnegie Mellon University, US | |
| - | Modeling and Characterization of an Integrated FET Accelerometer |
| M.L. Kniffin, T.G. Wiegele, M.P. Masquelier, H. Fu, J. Whitfield | |
| Motorola, Inc., US | |
| - | Micromachined Accelerometer Design, Modeling and Validation |
| B.R. Davies, V.I. Bateman, F.A. Brown, S. Montague, J.R. Murray, D. Rey and J.H. Smith | |
| Sandia National Laboratories, US | |
| - | On the Vibrations of a MEMS Gyroscope |
| W.O. Davis and A.P. Pisano | |
| UC-Berkeley, US | |
| - | Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm |
| J.H. Correia, M. Bartek and R.F. Wolffenbuttel | |
| Delft University of Technology, LN | |
| - | Dynamic Effects of Linkage Joints in Electrostatic Microengines |
| J.J. Allen, S.L. Miller, G.F. LaVigne, M.S. Rodgers and W.P. Eaton | |
| Sandia National Laboratories, US | |
| - | An Integrated Pressure Sensor with High Performance |
| B.N. Lee, K.N. Kim, H.D. Park and S-M Shin | |
| Korea Electronics Technology Institute, KR | |
| - | Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives |
| W. Ye and S. Mukherjee | |
| Cornell University, US | |
| - | Simulation of Silicon Piezoresistive Sensors |
| K. Matsuda and Y. Kanda | |
| Toyo University, JP | |
| - | Finite Element Analysis of MEMS Diaphragm Valves |
| F. Yang and I. Kao | |
| SUNY-Stony Brook, US | |
| - | Robust Design of Silicon Piezoresistive Pressure Sensors |
| T-K Shing | |
| Industrial Technology Research Institute, TW | |
| - | Microsteping Control of Hybrid Stepper Motor Using Fuzzy Logic for Robotics Application |
| A.Z. Mohamed, A.M. Zaki | |
| Electronics Research Inst., EG | |
| ISBN: | 0-96661-35-0-3 |
| Pages: | 678 |
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