Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 11: Applications: Microfluidics

Analysis of Pressure Balanced MEMS Valves

Authors:F. Yang and I. Kao
Affilation:SUNY-Stony Brook, US
Pages:534 - 539
Keywords:fluid-structure interaction, plate theory, Bernoulli equation, MEMS valve
Abstract:Based on simple plate theory and the Bernoulli equation, the effect of fluid flow on the deformation of fluid driven MEMS diaphragm microvalve is investigated analytically and numerically. The static instability of such a microsystem is demonstrated with both analytical and numerical solutions. Theoretical formula is presented for prediction of the limit flow velocity at which the pressure difference across the diaphragm is positive over the whole MEMS diaphragm. In addition, static stiction phenomena is analyzed and a closed form sc ution of the relation between the contact zone and the external pressure is obtained. The results provide important information of parameters in the design of MEM diaphragm valve and can be used as a basis in the mechanical design of such valves.
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