Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 11: Applications: Microfluidics

Modeling 3-D Fluid Flow for a MEMS Laminar Proportional Amplifier

Authors:M.M. Athavale, H.Y. Li, A.J. Przekwas, B.H. Piekarski, R.J. Zeto and S.M. Tenney
Affilation:CFD Research Corporation, US
Pages:522 - 527
Keywords:Flow simulation, fluid dynamics, fluidic arnplifier, MEMS processing
Abstract:Fluid flow in a microfluidic laminar proportional amplifier (LPA) was simulated using an advanced 3-D flow solver, CFD-ACE+. Pressure gains for single-stage and two-stage blocked output LPAs were calculated under a variety of flow conditions and compared with experimental data. Modeled gains compared well with results from experiments and established design correlations. The accuracy of the results on the complex amplifier flows demonstrates the flow solver's capability to yield reliable predictions and its potential usefulness in the design and performance predictions of microfluidic devices.
Modeling 3-D Fluid Flow for a MEMS Laminar Proportional AmplifierView PDF of paper
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