Modeling of a Piezo Paddle Mikro Pump


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In this paper an analytical method will be presentea to describe the behavior of a piezo electric paddle pump. For that, mechanical and fluidic mechanism are combined in a one mass oscillator model with fluidic damping. With that model it is possible to simulate the complete droplet ejection process. It is also possible to optirni z he shape of the actuator, the number of nozzles, the location of the nozzles and the shape of the pump chamber. As a result, the simulation will be compared with the measurements of a real droplet generator. Additional design rules for such a micro pump will be given.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 512 - 516
Industry sector: Sensors, MEMS, Electronics
Topic: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 0-96661-35-0-3