Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 11: Applications: Microfluidics

Squeeze Film Damping Effect on the Dynamic Response of a MEMS Torsion Mirror

Authors:F. Pan, J. Kubby, E. Peeters, A.T. Tran and S. Mukherjee
Affilation:XEROX, Xerox Wilson Research Center, US
Pages:474 - 479
Keywords:squeeze film damping toraue, torsion mirror, Reynold's equation, series solutions.
Abstract:Analytical formulae for the squeeze film darnping torque on a MEMS torsion mirror are derived based on series solutions to the linearized Reynold's equation. The derivation is carried out under the assumption that the angular displacement of the mirror is small and is a harmonic function of time. This analytical squeeze film damping model is verified by numerically solving the nonlinear isothermal Reynold's equation [1], and by conducting experimental measurements on a prototype device. Finally it is shown that although the analytical damping model is derived under the assumption of harmonic time response of the torsion mirror, it is still valid for the case of non-harmonic response, as long as the squeeze number is fairly small.
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