 | MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 10: Applications: Chemical Sensors |
| | Thermal Simulation Tools for Microsystem Elements |
| Authors: | V. Székely, M. Rencz, A. Páhi, A. Poppe and Sz. Hajder |
| Affilation: | Technical University of Budapest, Hungary |
| Pages: | 463 - 468 |
| Keywords: | thermal simulation tools, MEMS |
| Abstract: | Two different field solver tools have been developed in order ro facilitate fast thermal and electro-static simulation of microsystem elements. The pSTHERMANAL program is capable for the fast steadystate and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a generalfield solver based on an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation. |
 | View paper |
| ISBN: | 0-96661-35-0-3 |
| Pages: | 678 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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