Authors: V. Székely, M. Rencz, A. Páhi, A. Poppe and Sz. Hajder
Affilation: Technical University of Budapest, Hungary
Pages: 463 - 468
Keywords: thermal simulation tools, MEMS
Two different field solver tools have been developed in order ro facilitate fast thermal and electro-static simulation of microsystem elements. The pSTHERMANAL program is capable for the fast steadystate and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a generalfield solver based on an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation.