Thermal Simulation Tools for Microsystem Elements

	MSM 98 Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems Chapter 10: Applications: Chemical Sensors
	Thermal Simulation Tools for Microsystem Elements
Authors:	V. Székely, M. Rencz, A. Páhi, A. Poppe and Sz. Hajder
Affilation:	Technical University of Budapest, HU
Pages:	463 - 468
Keywords:	thermal simulation tools, MEMS
Abstract:	Two different field solver tools have been developed in order ro facilitate fast thermal and electro-static simulation of microsystem elements. The pSTHERMANAL program is capable for the fast steadystate and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a generalfield solver based on an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation.
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ISBN:	0-96661-35-0-3
Pages:	678
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