Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 10: Applications: Chemical Sensors

From Layout to System Simulation: An Example of an Oxygen Sensor

Authors:H. Camon, M. Djafari-Rouhani, A.M. Gué, M. Dilhan, C. Alonso and B. Jammes
Affilation:LAAS-CNRS, FR
Pages:457 - 462
Keywords:layout, chemical sensor, diffusion, system simulation
Abstract:The development of microsystems has shown that the technologies and tools are mature enough to investigate the possibilities of complete CAD tools, as is the case in integrated circuit design. An oxygen sensor has been taken as an example. A parametrized cell has been created within the CADENCE framework allowing the layout design of the structure without knowledge of the technologies. On the other hand, the model has been implemented in the MAST analog hardware description language taking into account the diffusion effect. This model can be associated with other electric components of the system in the SABER software simulator to predict the behaviour of the system or to optimize the sensor geometry.
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