Nano Science and Technology Institute
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Chapter 1:

Plenary Lectures

-Challenges in Process Modeling for MEMS
 R.W. Dutton, E.K. Chan, N.W. Wilson, Z-K Hsiau and S. Shen
 Stanford University, U.S.A.
-CMOS MEMS and their Simulation
 J.G. Korvink, M. Emmenegger, S. Taschini and H. Baltes
 ETH Zürich, Switzerland
-Micromanipulation and Robotic Technology
 T. Fukuda, F. Arai
 Univerisity of Nagoya, Japan
-Simulation and Modeling of Optoelectronic Devices, Circuits and Systems
 J.J. Morikuni, P.V. Mena, A.V. Harton, K.W. Wyatt
 Motorola, U.S.A.
-A Multi-disciplinary Design Flow for Designing Embedded System on Silicon
 I. Bolsens
 IMEC, Belgium
ISBN:0-96661-35-0-3
Pages:678
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