MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Plenary Lectures Chapter 1

Challenges in Process Modeling for MEMS
R.W. Dutton, E.K. Chan, N.W. Wilson, Z-K Hsiau and S. Shen
Stanford University, US

CMOS MEMS and their Simulation
J.G. Korvink, M. Emmenegger, S. Taschini and H. Baltes
ETH Zürich, CH

Micromanipulation and Robotic Technology
T. Fukuda, F. Arai
Univerisity of Nagoya, JP

Simulation and Modeling of Optoelectronic Devices, Circuits and Systems
J.J. Morikuni, P.V. Mena, A.V. Harton, K.W. Wyatt
Motorola, US

A Multi-disciplinary Design Flow for Designing Embedded System on Silicon
I. Bolsens
IMEC, BE


ISBN: 0-96661-35-0-3
Pages: 678