Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Numerics Chapter 7

Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program

Authors: M. Gyimesi, D. Ostergaard and I. Avdeev

Affilation: ANSYS, Inc., United States

Pages: 380 - 383

Keywords: MEMS, finite elements, transducer, reduced order modeling

Abstract:
The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.

Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program

ISBN: 0-9708275-7-1
Pages: 764