Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
 
Chapter 7: Numerics
 

Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program

Authors:M. Gyimesi, D. Ostergaard and I. Avdeev
Affilation:ANSYS, Inc., US
Pages:380 - 383
Keywords:MEMS, finite elements, transducer, reduced order modeling
Abstract:The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.
Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element ProgramView PDF of paper
ISBN:0-9708275-7-1
Pages:764
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