Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program

	Nanotech 2002 Vol. 1 Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems Chapter 7: Numerics
	Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program
Authors:	M. Gyimesi, D. Ostergaard and I. Avdeev
Affilation:	ANSYS, Inc., US
Pages:	380 - 383
Keywords:	MEMS, finite elements, transducer, reduced order modeling
Abstract:	The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.
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ISBN:	0-9708275-7-1
Pages:	764
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