Authors: M. Gyimesi, D. Ostergaard and I. Avdeev
Affilation: ANSYS, Inc., United States
Pages: 380 - 383
Keywords: MEMS, finite elements, transducer, reduced order modeling
The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.