Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Numerics

An Efficient Optical Propagation Technique for Optical MEM Simulation

Authors:T.P. Kurzweg, S.P. Levitan, J.A. Martinez, M. Kahrs and D.M. Chiarulli
Affilation:University of Pittsburgh, US
Pages:352 - 355
Keywords:optical MEMS, MOEMS, angular spectrum, optical propagation, CAD
Abstract:As designers become more aggressive in introducing optical components into micro-systems, additional capabilities are required for modeling and simulation tools. Common optical modeling techniques are not applicable for most optical micro-systems, and techniques that are valid are computationally slow. In this paper, we introduce an angular spectrum propagation modeling technique that greatly reduces computation time while maintaining the accuracy of the full scalar formulation. We present simulations of light propagating through optical MEM components and show the advantages of this optical propagation method and the integration of the technique into a system-level multidomain CAD tool.
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