Authors: J. Jin and Z. Zhou
Affilation: Georgia Institute of Technology, United States
Pages: 306 - 309
Keywords: pressure sensor array, ANSYS 5.7, CMOS, MEMS, simulation
In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor array with multi-range and multi-function using ANSYS 5.7. The polysilicon sensor array rests atop multi-layer diaphragms. The specific configuration, the dynamic range, and the performance of individual sensors and the array as a whole are simulated. The resulting sensor array will be integrated with CMOS circuits.