Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Simulation and Modeling of a Micro Pressure Sensor Array

Authors: J. Jin and Z. Zhou

Affilation: Georgia Institute of Technology, United States

Pages: 306 - 309

Keywords: pressure sensor array, ANSYS 5.7, CMOS, MEMS, simulation

Abstract:
In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor array with multi-range and multi-function using ANSYS 5.7. The polysilicon sensor array rests atop multi-layer diaphragms. The specific configuration, the dynamic range, and the performance of individual sensors and the array as a whole are simulated. The resulting sensor array will be integrated with CMOS circuits.

Simulation and Modeling of a Micro Pressure Sensor Array

ISBN: 0-9708275-7-1
Pages: 764