Simulation and Modeling of a Micro Pressure Sensor Array

	Nanotech 2002 Vol. 1 Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems Chapter 5: MEMS Applications and Characterization
	Simulation and Modeling of a Micro Pressure Sensor Array
Authors:	J. Jin and Z. Zhou
Affilation:	Georgia Institute of Technology, US
Pages:	306 - 309
Keywords:	pressure sensor array, ANSYS 5.7, CMOS, MEMS, simulation
Abstract:	In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor array with multi-range and multi-function using ANSYS 5.7. The polysilicon sensor array rests atop multi-layer diaphragms. The specific configuration, the dynamic range, and the performance of individual sensors and the array as a whole are simulated. The resulting sensor array will be integrated with CMOS circuits.
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ISBN:	0-9708275-7-1
Pages:	764
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