Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 5: MEMS Applications and Characterization

Simulation and Modeling of a Micro Pressure Sensor Array

Authors:J. Jin and Z. Zhou
Affilation:Georgia Institute of Technology, US
Pages:306 - 309
Keywords:pressure sensor array, ANSYS 5.7, CMOS, MEMS, simulation
Abstract:In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor array with multi-range and multi-function using ANSYS 5.7. The polysilicon sensor array rests atop multi-layer diaphragms. The specific configuration, the dynamic range, and the performance of individual sensors and the array as a whole are simulated. The resulting sensor array will be integrated with CMOS circuits.
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