Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
 
Chapter 5: MEMS Applications and Characterization
 

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Authors:J.P. Loughlin, R.K. Fettig, S.H. Moseley, A.S. Kutyrev and D.B. Mott
Affilation:NASA/Goddard Space Flight Center, US
Pages:291 - 293
Keywords:MEMS, micro-shutter, silicon nitride, electrostatic, electromagnetic
Abstract:Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5mm silicon nitride micro-shutter for use in a space-based Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go from the closed, 0 degree, position, to the open, 90 degree position. Stresses in the torsion bar are determined with a large deformation nonlinear finite element model. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.
Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space ApplicationsView PDF of paper
ISBN:0-9708275-7-1
Pages:764
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