Authors: Z. Andjelic, P. Krippner and A. Vogel
Affilation: ABB Corporate Research Center, Germany
Pages: 279 - 282
Keywords: BEM, magnetostatic, MBIT, integral methods, sensors
The paper presents the methodology for the Simulation Based Design (SBD) of MEMS sensors influenced by mechanical and electromagnetic phenomena. The complexity of the problems mostly asks for both the efficient 3D numerical technologies and the sophisticated tools to capture the physical phenomena appearing in the operational conditions. In this paper we present the application of the Multipole Based Integral Technology (MBIT) for the simulation of MEMS-based paramagnetic oxygen sensors. A special procedure for the calculation of the forces caused by the molecular pressure is also presented.