Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
 
Chapter 5: MEMS Applications and Characterization
 

Simulation Based Design of O2 MEMS Sensor

Authors:Z. Andjelic, P. Krippner and A. Vogel
Affilation:ABB Corporate Research Center, DE
Pages:279 - 282
Keywords:BEM, magnetostatic, MBIT, integral methods, sensors
Abstract:The paper presents the methodology for the Simulation Based Design (SBD) of MEMS sensors influenced by mechanical and electromagnetic phenomena. The complexity of the problems mostly asks for both the efficient 3D numerical technologies and the sophisticated tools to capture the physical phenomena appearing in the operational conditions. In this paper we present the application of the Multipole Based Integral Technology (MBIT) for the simulation of MEMS-based paramagnetic oxygen sensors. A special procedure for the calculation of the forces caused by the molecular pressure is also presented.
Simulation Based Design of O2 MEMS SensorView PDF of paper
ISBN:0-9708275-7-1
Pages:764
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