Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 5: MEMS Applications and Characterization

Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs

Authors:E.M. Ochoa, L.A. Starman_Jr., W.D. Cowan, T.R. Nelson_Jr., O. Blum Spahn and J.A. Lott
Affilation:Air Force Institute of Technology, US
Pages:266 - 269
Keywords:WDM, MEMS, tunable filter, tunable VCSEL, hybrid integration
Abstract:We characterize our novel mechanical structures for flip-bonded hybrid micro-electro-mechanically (MEM) tunable filters (MEM-TF) and MEM-tunable vertical cavity surface emitting lasers (MEM-TVCSELs) by comparing simulations with foundry fabricated actuators. Two of our prototypes, each with different flexure thickness, have analytically simulated and measured pull-in voltages of (11.6 V, 11.8 ± 0.1 V) and (8.4 V, 7.7 ± 0.5 V) respectively. We believe our hybrid approach will reduce cost, shorten development time, enable use of standard flip-chip technology and IC/MEMS foundries, and offer materials flexibility since the components do not need to be lattice matched.
Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELsView PDF of paper
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