Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
 
Chapter 5: MEMS Applications and Characterization
 

Simulation and Measurement of Dielectric Charging in Electrostatically Actuated Capacitive Microwave Switches

Authors:J.R. Reid
Affilation:US Air Force Research Laboratory, AFRL/SNHA, US
Pages:250 - 253
Keywords:microwave switches, dielectric charging, reliability
Abstract:Simulations of the effects of dielectric charging on the operation of electrostatically actuated capacitive microwave switches have been performed. The simulations are unique in that they incorporate fixed charges into the calculation of the beam deflection. These simulations show that fixed charges in the dielectric layer cause a shift in the capacitance-voltage curve of the switch. The shift in the curve is proportional to the magnitude and depth of the charge, while the direction of the shift is determined by the polarity of the charge. Further, it is shown that sufficient charge can result in a failure of the switch to release from the dielectric layer. The simulation is confirmed by comparison with measured data.
Simulation and Measurement of Dielectric Charging in Electrostatically Actuated Capacitive Microwave SwitchesView PDF of paper
ISBN:0-9708275-7-1
Pages:764
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