Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Chapter 5:

MEMS Applications and Characterization

-Development and Performance of a PVM Based Parallel Geometric Modeler for MEMS
 C. Jorgensen, D. Melander, R. Schmidt and S. Plimpton
 Sandia National Laboratories, US
-Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive
 M. Jianqiang, C. Shixin, L. Yi, L. Boon Buan
 Data Storage Institute, SG
-Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors
 W.J. Wang and R.M. Lin
 Nanyang Technological, SG
-Snap-Through Bilayer Microbeam
 A. Cabal and D.S. Ross
 Eastman Kodak Company, US
-Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor
 M. Innocent, P. Wambacq, S. Donnay, H. Tilmans, M. Engels, H. DeMan and W. Sansen
-Comparative Studies of Novel Capacitive Transducers with Non-Planar Diaphragms
 J. Chen, L. Liu and Z. Li
 Tsinghua University, CN
-Flow Cell Detection with an Optical Fiber
 E. Kim, W. Kim, S-G Lee and S. Park
 Kyungpook National University, KR
-Design of the Two-Movable Plates Type MEMS Voltage Tunable Capacitor
 Y. Kim, S-G Lee and S. Park
 Kyungpook National University, KR
-Simulation and Measurement of Dielectric Charging in Electrostatically Actuated Capacitive Microwave Switches
 J.R. Reid
 US Air Force Research Laboratory, AFRL/SNHA, US
-Prediction Model of Microlens Fabricated by Modified LIGA Process
 D.S. Kim, S-K Lee, S.S. Yang, T.H. Kwon and S.S. Lee
 Pohang University of Science and Technology, KR
-Simulation of Electrical Field Induced Particle Transfer
 R. Hoffmann and G. Wachutka
 OcĂ© Printing Systems, DE
-Modeling and Simulation of Silicon Microsystem of Chemical Signals
 M. Daniel, M. Szermer, K. Slusarczyk and A. Napieralski
 Technical University of Lodz, PL
-Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs
 E.M. Ochoa, L.A. Starman_Jr., W.D. Cowan, T.R. Nelson_Jr., O. Blum Spahn and J.A. Lott
 Air Force Institute of Technology, US
-Simulation and Validation of Bulk Micromachined 6H-SiC High-g Piezoresistive Accelerometer
 A.R. Atwell, R.S. Okojie, K.T. Kornegay, S. Roberson and A. Beliveau
 Cornell University, US
-Implementation of a Nonlinear Control Law for the Magnetostrictive Beam Vibrations by an Amplifier of Current to Current
 G.S. Bereksi
 Center of Advanced European Studies And Research, DE
-Simulation Based Design of O2 MEMS Sensor
 Z. Andjelic, P. Krippner and A. Vogel
 ABB Corporate Research Center, DE
-Nonlinear Micromachined Flexure for Stiction Reduction
 D-H Shim and J-W Cho
 Samsung Advanced Institute of Technology, KR
-Analytical Pull-in Study on Non-Deformable Electrostatic Micro Actuators
 J. Zhe, X. Wu, J. Cheng, J. Wang, K.R. Farmer, L. Frechette and V. Modi
 Columbia University, US
-Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications
 J.P. Loughlin, R.K. Fettig, S.H. Moseley, A.S. Kutyrev and D.B. Mott
 NASA/Goddard Space Flight Center, US
-Concept of an Intelligent Microsystem Structure for Communication with Real Surrounding Space
 M. Husak and J. Jakovenko
 Czech Technical University, CZ
-Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators
 J. Cheng, J. Zhe, X. Wu, K.R. Farmer, V. Modi and L. Frechette
 Columbia University, US
-Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism
 N. Masters and L.L. Howell
 Georgia Institute of Technology, US
-Simulation and Modeling of a Micro Pressure Sensor Array
 J. Jin and Z. Zhou
 Georgia Institute of Technology, US
-RF Measurement Techniques for Micro-Cantilever Characterization and Application
 C-H Wang and R.J. Weber
 Iowa State University, US
-Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy
 L.A. Starman_Jr., E.M. Ochoa, J.A. Lott, M.S. Amer, W.D. Cowan and J.D. Busbee
 Air Force Institute of Technology, US
-Magnetohydrodynamic Micromixing
 J.P. Gleeson and J. West
 University College Cork, IR
-A Study of the Behaviour of Magnetic Microactuators
 M. Flynn and J.P. Gleeson
 University College Cork, IR
-Modeling Sub-Continuum Effects on the Mechanical Properties of Ultrathin Macromolecular Layers
 W.P. King and K.E. Goodson
 Stanford University, US
-Capillary Interaction Between a Small Thin Solid Plate and a Liquid
 M. Taher and T. Saif
 University of Illinois Urbana-Champaign, US
-Modeling a Growth Instability in Stressed and Ion-Implanted Doped Silicon
 A-V Phan, T. Kaplan, L.J. Gray, W. Barvosa-Carter and M.J. Aziz
 Oak Ridge National Laboratory, US
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