Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 4: Optimization, Co-Simulation

Optimal Design of a MEMS Relay Switch

Authors:M.P. Brenner, J. Lang, J. Li, J. Qiu and A. Slocum
Affilation:Harvard University, US
Pages:214 - 217
Keywords:switch, MEMS, optimization
Abstract:We describe a novel methodology for predicting optimal designs for microelectromechanical devices. The methods are applied towards the optimization of component shapes of a bistable MEMS switch. Small modifications in component shapes lead to a substantial improvement in the device operation.
Optimal Design of a MEMS Relay SwitchView PDF of paper
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