Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Optimization, Co-Simulation Chapter 4

Optimal Design of a MEMS Relay Switch

Authors: M.P. Brenner, J. Lang, J. Li, J. Qiu and A. Slocum

Affilation: Harvard University, United States

Pages: 214 - 217

Keywords: switch, MEMS, optimization

Abstract:
We describe a novel methodology for predicting optimal designs for microelectromechanical devices. The methods are applied towards the optimization of component shapes of a bistable MEMS switch. Small modifications in component shapes lead to a substantial improvement in the device operation.

Optimal Design of a MEMS Relay Switch

ISBN: 0-9708275-7-1
Pages: 764