Optimal Design of a MEMS Relay Switch

	Nanotech 2002 Vol. 1 Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems Chapter 4: Optimization, Co-Simulation
	Optimal Design of a MEMS Relay Switch
Authors:	M.P. Brenner, J. Lang, J. Li, J. Qiu and A. Slocum
Affilation:	Harvard University, US
Pages:	214 - 217
Keywords:	switch, MEMS, optimization
Abstract:	We describe a novel methodology for predicting optimal designs for microelectromechanical devices. The methods are applied towards the optimization of component shapes of a bistable MEMS switch. Small modifications in component shapes lead to a substantial improvement in the device operation.
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ISBN:	0-9708275-7-1
Pages:	764
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