 | Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 4: Optimization, Co-Simulation |
An Efficient Numerical Algorithm for Extracting Pull-In Hyper-Surfaces of Electrostatic Actuators with Multiple Uncoupled Electrodes | |
| Authors: | D. Elata, O. Bochobza-Degani and Y. Nemirovsky |
| Affilation: | Technion – Israel Institute of Technology, IL |
| Pages: | 206 - 209 |
| Keywords: | pull-in hypersurface, multiple uncoupled voltage sources, DIPIE, electrostatic actuation |
| Abstract: | In this work the stability of electrostatic actuators with multiple uncoupled voltage sources applied to separate isolated excitation electrodes is analyzed. These electrodes are used to drive a continuous deformable element. A novel computational strategy and an efficient numerical scheme for simulating such problems are presented. The theory of the stability of electrostatic actuation and specifically the notion of the Pull-In state are generalized to such systems. In this respect, for an actuator with K-uncoupled electrodes and N-degrees of freedom, the Pull-In is shown to be a K-1 dimensional hyper-surface in a N+K dimensional state-space of the actuator. The novel strategy enables the extraction of the Pull-In hyper-surface by scanning the voltage space along voltage hyper-rays. Along these rays a DIPIE scheme is used to rapidly extract the Pull-In parameters, resulting in an efficient multi-DIPIE scheme. To illustrate the strategy a clamped-clamped beam actuator with multiple electrodes is analyzed. |
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| ISBN: | 0-9708275-7-1 |
| Pages: | 764 |
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