Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Optimization, Co-Simulation Chapter 4

Optimization of a Micro Actuator Plate Using an Evolutionary Algorithm and Simulation Based on Discrete Element Methods
A. Quinte, W. Jakob, K-P Scherer and H. Eggert
Forschungszentrum Karlsruhe, DE

Capillary Forces in Micro-Fluidic Self-Assembly
A. Greiner, J. Lienemann, J.G. Korvink, X. Xiong, Y. Hanein and K.F. Böhringer
IMTEK, Albert Ludwig University, DE

Actuation for Probe-Based Mass Data Storage
J.F. Alfaro and G.K. Fedder
Carnegie Mellon University, US

An Efficient Numerical Algorithm for Extracting Pull-In Hyper-Surfaces of Electrostatic Actuators with Multiple Uncoupled Electrodes
D. Elata, O. Bochobza-Degani and Y. Nemirovsky
Technion – Israel Institute of Technology, IL

Thermal and Load-Deflection FE Analyses of Parylene Diaphragms
W. Sim, B. Kim, B. Choi and J-O Park
Intelligent Microsystem Center, KR

Optimal Design of a MEMS Relay Switch
M.P. Brenner, J. Lang, J. Li, J. Qiu and A. Slocum
Harvard University, US


ISBN: 0-9708275-7-1
Pages: 764