 | Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 3: System Level Modeling of MEMS |
Behavioral Modeling of a Humidity Sensor Using an Analog Hardware Description Language | |
| Authors: | A. Tételin, H. Lévi, B. Mongellaz and C. Pellet |
| Affilation: | Laboratoire IXL, FR |
| Pages: | 146 - 149 |
| Keywords: | humidity sensor, capacitive sensor, VHDL-AMS modeling, analog behavioral models |
| Abstract: | Measuring relative humidity in breath is useful for diagnosing pulmonary diseases. Humidity capacitive sensors were developed to equip a portable clinical device. Simulation is needed to design an electronic interface circuit to be integrated on the same chip as the sensors. A behavioral model of one of these sensors is set out in this paper. It is designed to be included in the model of the microsystem-to-be. It is based on experimental results on the static and dynamic responses of the sensor to humidity and temperature changes. Simulation results fit experimental data with an error inferior to 1%. The model is an illustration of VHDL-AMS capabilities as a modeling language to describe physical phenomena. The method of modeling can be extended to other kinds of sensors. Including the model in a simple microsystem model provides encouraging results. |
 | View PDF of paper |
| ISBN: | 0-9708275-7-1 |
| Pages: | 764 |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up |
© 2013 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map
Terms of Use | Privacy Policy | Contact Us | Site Map