Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 3: System Level Modeling of MEMS

Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices

Authors:O. Yaglioglu, Y.H. Su, D.C. Roberts, J. Carretero and N.W. Hagood
Affilation:Massachusetts Institute of Technology,, US
Pages:120 - 123
Keywords:microhydraulic, power generation, piezoelectric
Abstract:This paper reports on modeling, simulation and design considerations for piezoelectric Micro-Hydraulic Transducer (MHT) systems, focusing on power generation applications. Since these devices are complex fluid and structural systems, comprehensive simulation tools are needed for effective design. A system level simulation tool has been developed using SimulinkTM, by integrating models for different energy domains, namely fluids, structures, piezoelectrics and circuitry. The simulation allows for the monitoring of important parameters such as chamber pressure, flowrate, and various structural component deflections and stresses. Using the simulation, the operation of the system is analyzed and important design considerations are evaluated. Results indicate that system efficiency is highly dependent on compliances within the device structure and the type of piezoelectric material used.
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