Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries

Authors: Y-J Yang and C-J Yu

Affilation: National Taiwan University, Taiwan

Pages: 178 - 181

Keywords: damping, model order reduction, squeeze film damping, perforation, perforation flow impedance

Abstract:
In this work, we present an application of an Arnoldi-based model order reduction (MOR) technique on squeezed-film damping (SQFD) effects for arbitrarily-shaped perforated geometries. The compact models generated by this approach not only can be easily inserted into a system-level modeling package for transient and frequency analysis, but also accounts for the effect of flow impedance of each perforation. The simulated results of the reduced models show good agreement with the experimental results. We also demonstrated that this approach is at least 100 times faster than previous works on perforated SQFD damping simulation.


ISBN: 0-9708275-7-1
Pages: 764

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