Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems

Authors: N.R. Tas, T.S.J. Lammerink, J.W. Berenschot, M.C. Elwenspoek and A. van den Berg

Affilation: University of Twente, LN

Pages: 174 - 177

Keywords: scaling, micro-fluidics, hydraulic oscillator

This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic networks consisting of linear resistors, capacitors and inertances has been studied. An important result is that to make smaller networks faster, driving pressures should increase with reducing size.

Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems

ISBN: 0-9708275-7-1
Pages: 764