Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 3: System Level Modeling of MEMS

Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems

Authors:N.R. Tas, T.S.J. Lammerink, J.W. Berenschot, M.C. Elwenspoek and A. van den Berg
Affilation:University of Twente, LN
Pages:174 - 177
Keywords:scaling, micro-fluidics, hydraulic oscillator
Abstract:This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic networks consisting of linear resistors, capacitors and inertances has been studied. An important result is that to make smaller networks faster, driving pressures should increase with reducing size.
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