Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems

	Nanotech 2002 Vol. 1 Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems Chapter 3: System Level Modeling of MEMS
	Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems
Authors:	N.R. Tas, T.S.J. Lammerink, J.W. Berenschot, M.C. Elwenspoek and A. van den Berg
Affilation:	University of Twente, LN
Pages:	174 - 177
Keywords:	scaling, micro-fluidics, hydraulic oscillator
Abstract:	This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic networks consisting of linear resistors, capacitors and inertances has been studied. An important result is that to make smaller networks faster, driving pressures should increase with reducing size.
	View PDF of paper
ISBN:	0-9708275-7-1
Pages:	764
Up