Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Simulation of a Micro Dispenser Using Lumped Models

Authors: P. Koltay, C. Moosmann, C. Litterst, W. Streule and R. Zengerle

Affilation: University of Freiburg, Germany

Pages: 170 - 173

Keywords: system modelling, lumped model, microfluidic systems, micro dispenser, circular plate

In this paper the modelling of a micro dispenser by system simulations according to fluidic network theory is reported. The dispensing device under consideration (the so called “Nano-Jet” dispenser) is described in detail in [1]. In this device the dispensing process is triggered by the displacement of a diaphragm. Upon this actuation a free jet of liquid in the volume range of 10 nl to 100 nl is ejected from the orifice of the device. Thus the system is in some sense similar to an ink-jet print head except the fact, that a liquid jet is generated rather than droplets and a much larger volume is delivered. To set up a system model for the sketched device first a lumped model for a circular plate is derived which accounts for all essential features of fluid structure interaction (FSI) in the system. Then the plate model is combined with lumped elements of a fluidic channel and a nozzle to yield the system model of the dispenser. The results obtained with the system model are compared to experimental data in terms of ejected volume and influence of system parameters.

Simulation of a Micro Dispenser Using Lumped Models

ISBN: 0-9708275-7-1
Pages: 764