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 | Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 3: System Level Modeling of MEMS |
| | Static Equivalent Circuit Model for a Capacitive MEMS RF Switch | | Authors: | T. Tinttunen, T. Veijola, H. Nieminen, V. Ermolov and T. Ryhanen | | Affilation: | Helsinki University of Technology, Finland | | Pages: | 166 - 169 | | Keywords: | MEMS, RF, capacitive switch, tunable capacitor, equivalent circuit | | Abstract: | A simulation model for static analysis of a doubly supported capacitive MEMS RF switch has been constructed using electrical equivalencies. Energy-conserving large-displacement macro models for beam deflection, gap capacitance, electrostatic force, and mechanical contact are utilized. A one-dimensional finite-difference approach is utilized. The model is capable of reproducing the large-displacement beam deflection profile. The static model is verified by comparing APLAC© simulation results with measured CV characteristics. The results show that the model correctly reproduces the CV characteristics, including the performance at contact. |  | View paper | | ISBN: | 0-9708275-7-1 |
| Pages: | 764 |
| Hardcopy: | $100.00 |
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