Micromechanical Pierce Oscillator for Resonant Sensing Applications

	Nanotech 2002 Vol. 1 Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems Chapter 3: System Level Modeling of MEMS
	Micromechanical Pierce Oscillator for Resonant Sensing Applications
Authors:	A.A. Seshia, W. Low, S.A. Bhave, R.T. Howe and S. Montague
Affilation:	University of California, US
Pages:	162 - 165
Keywords:	micromechanical oscillator, resonator, resonant sensing, Pierce circuit
Abstract:	We present the design techniques and experimental characterization of a Pierce oscillator circuit adapted for micromechanical elements with resonant frequencies lying between 100 and 300 kHz. Micromechanical double-ended tuning fork resonators serve as the crystal element of the oscillator. The measured phase noise of these oscillators lies below -100 dBc/Hz at a frequency offset of 500 Hz away from the carrier with in-circuit quality factors exceeding 30000. This noise figure improves upon previous reported values and demonstrates the feasibility of a Pierce oscillator for micromechanical vibrating elements with resonant frequencies lying under 1 MHz. The value of the second harmonic distortion factor (HD2) is -44 dB for an output amplitude of 50 mV.
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ISBN:	0-9708275-7-1
Pages:	764
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