Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Nonlinear Analytical Reduced-Order Models for MEMS

Authors: E.R. Westby and T.A. Fjeldly

Affilation: Norwegian University of Science and Technology, Norway

Pages: 150 - 153

Keywords: reduced-order models, nonlinear normal modes, MEMS

We present a method for constructing a nonlinear, analytical, reduced-order model for MEMS-structures. The method is based on the center manifold approach for describing nonlinear modes of mechanical systems, in combination with techniques for predicting eigenvalues and eigenvectors. When considering a given mode of the mechanical system, this method, unlike modal truncation procedures, takes into account the effects of nonlinearities of the non-modeled modes. Here we present the details of the method and demonstrate its capabilities by applying it to an accelerometer-structure.

Nonlinear Analytical Reduced-Order Models for MEMS

ISBN: 0-9708275-7-1
Pages: 764