Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Chapter 3:

System Level Modeling of MEMS

-Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices
 O. Yaglioglu, Y.H. Su, D.C. Roberts, J. Carretero and N.W. Hagood
 Massachusetts Institute of Technology, US
-Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators
 R. Sattler, G. Schrag and G. Wachutka
 Munich University of Technology, DE
-Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Microm䁡chined Devices Using an Aggregated Projection Basis
 M. Rewienski and J.K. White
 Massachusetts Institute of Technology, US
-Integrated Modeling of Optical MEMS Subsystems
 R. Stoll, T. Plowman, D. Winick and A. Morris
 Coventor, US
-Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS
 Q. Jing, T. Mukherjee and G.K. Fedder
 Carnegie Mellon University, US
-Integrated Hierarchical Design of Microelectrofluidic Systems using SystemC
 T. Zhang, K. Chakrabarty and R.B. Fair
 Cadence Design Systems, Inc., US
-Behavioral Modeling of a Humidity Sensor Using an Analog Hardware Description Language
 A. Tételin, H. Lévi, B. Mongellaz and C. Pellet
 Laboratoire IXL, FR
-Nonlinear Analytical Reduced-Order Models for MEMS
 E.R. Westby and T.A. Fjeldly
 Norwegian University of Science and Technology, NO
-Noise Considerations for Closed Loop Digital Accelerometers
 E. Gaura and M. Kraft
 Coventry University, UK
-Coupled-Energy-Domain Macromodeling of MEMS Devices
 G. Casinovi
 Georgia Institute of Technology, US
-Micromechanical Pierce Oscillator for Resonant Sensing Applications
 A.A. Seshia, W. Low, S.A. Bhave, R.T. Howe and S. Montague
 University of California, US
-Static Equivalent Circuit Model for a Capacitive MEMS RF Switch
 T. Tinttunen, T. Veijola, H. Nieminen, V. Ermolov and T. Ryhanen
 Helsinki University of Technology, FI
-Simulation of a Micro Dispenser Using Lumped Models
 P. Koltay, C. Moosmann, C. Litterst, W. Streule and R. Zengerle
 University of Freiburg, DE
-Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems
 N.R. Tas, T.S.J. Lammerink, J.W. Berenschot, M.C. Elwenspoek and A. van den Berg
 University of Twente, LN
-Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries
 Y-J Yang and C-J Yu
 National Taiwan University, TW
-Dispersion Modeling in Microfluidic Channels for System-level Optimization
 B. Baidya, T. Mukherjee and J.F. Hoburg
 Carnegie Mellon University, US
-Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope
 S. Iyer and T. Mukherjee
 Carnegie Mellon University, US
-Time-Domain Reduced-Order Models of Lateral Viscous Damping Effects for 3-D Geometries
 P-C Yen and Y-J Yang
 National Taiwan University, TW
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