System Level Modeling of MEMS

	Nanotech 2002 Vol. 1 Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems Chapter 3: System Level Modeling of MEMS
-	Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices
	O. Yaglioglu, Y.H. Su, D.C. Roberts, J. Carretero and N.W. Hagood
	Massachusetts Institute of Technology, USA
-	Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators
	R. Sattler, G. Schrag and G. Wachutka
	Munich University of Technology, Germany
-	Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Microm chined Devices Using an Aggregated Projection Basis
	M. Rewienski and J.K. White
	Massachusetts Institute of Technology, USA
-	Integrated Modeling of Optical MEMS Subsystems
	R. Stoll, T. Plowman, D. Winick and A. Morris
	Coventor, USA
-	Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS
	Q. Jing, T. Mukherjee and G.K. Fedder
	Carnegie Mellon University, USA
-	Integrated Hierarchical Design of Microelectrofluidic Systems using SystemC
	T. Zhang, K. Chakrabarty and R.B. Fair
	Cadence Design Systems, Inc., USA
-	Behavioral Modeling of a Humidity Sensor Using an Analog Hardware Description Language
	A. Tételin, H. Lévi, B. Mongellaz and C. Pellet
	Laboratoire IXL, France
-	Nonlinear Analytical Reduced-Order Models for MEMS
	E.R. Westby and T.A. Fjeldly
	Norwegian University of Science and Technology, Norway
-	Noise Considerations for Closed Loop Digital Accelerometers
	E. Gaura and M. Kraft
	Coventry University, United Kingdom
-	Coupled-Energy-Domain Macromodeling of MEMS Devices
	G. Casinovi
	Georgia Institute of Technology, USA
-	Micromechanical Pierce Oscillator for Resonant Sensing Applications
	A.A. Seshia, W. Low, S.A. Bhave, R.T. Howe and S. Montague
	University of California, USA
-	Static Equivalent Circuit Model for a Capacitive MEMS RF Switch
	T. Tinttunen, T. Veijola, H. Nieminen, V. Ermolov and T. Ryhanen
	Helsinki University of Technology, Finland
-	Simulation of a Micro Dispenser Using Lumped Models
	P. Koltay, C. Moosmann, C. Litterst, W. Streule and R. Zengerle
	University of Freiburg, Germany
-	Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems
	N.R. Tas, T.S.J. Lammerink, J.W. Berenschot, M.C. Elwenspoek and A. van den Berg
	University of Twente, The Netherlands
-	Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries
	Y-J Yang and C-J Yu
	National Taiwan University, Taiwan
-	Dispersion Modeling in Microfluidic Channels for System-level Optimization
	B. Baidya, T. Mukherjee and J.F. Hoburg
	Carnegie Mellon University, USA
-	Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope
	S. Iyer and T. Mukherjee
	Carnegie Mellon University, USA
-	Time-Domain Reduced-Order Models of Lateral Viscous Damping Effects for 3-D Geometries
	P-C Yen and Y-J Yang
	National Taiwan University, Taiwan
ISBN:	0-9708275-7-1
Pages:	764
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