Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

1. Plenary Lectures
2. Micro and Nano Fluidic Systems
3. System Level Modeling of MEMS
4. Optimization, Co-Simulation
5. MEMS Applications and Characterization
6. Magnetic Device Modeling and Design
7. Numerics
8. Process Modeling
9. Nanoscale Modeling of Front-End Processing in Silicon
10. Quantum Effects, Quantum Devices and Spintronics
11. Semiconductor Device Modeling
12. Circuit Simulation
13. Compact Modeling