Authors: T. Lam and R.B. Darling
Affilation: University of Washington, United States
Pages: 418 - 421
Keywords: stiction, cantilever beams, finite element method
A finite element model is combined with experimental data to extract the stiction force in MEMS cantilever beams. The model predicts cantilever behaviors both before and after snap-down has occurred. Experimental measurements of cantilevers have been performed to validate the model. With a reliable model and additional experimental data the stiction force between surfaces of MEMS devices can be extracted to predict device behavior or for process control.