Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 8: Characterizaton, Parameter Extraction, Calibration
	Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force
Authors:	T. Lam and R.B. Darling
Affilation:	University of Washington, US
Pages:	418 - 421
Keywords:	stiction, cantilever beams, finite element method
Abstract:	A finite element model is combined with experimental data to extract the stiction force in MEMS cantilever beams. The model predicts cantilever behaviors both before and after snap-down has occurred. Experimental measurements of cantilevers have been performed to validate the model. With a reliable model and additional experimental data the stiction force between surfaces of MEMS devices can be extracted to predict device behavior or for process control.
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ISBN:	0-9708275-0-4
Pages:	638
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