Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Characterizaton, Parameter Extraction, Calibration Chapter 8

Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force

Authors: T. Lam and R.B. Darling

Affilation: University of Washington, United States

Pages: 418 - 421

Keywords: stiction, cantilever beams, finite element method

Abstract:
A finite element model is combined with experimental data to extract the stiction force in MEMS cantilever beams. The model predicts cantilever behaviors both before and after snap-down has occurred. Experimental measurements of cantilevers have been performed to validate the model. With a reliable model and additional experimental data the stiction force between surfaces of MEMS devices can be extracted to predict device behavior or for process control.

Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force

ISBN: 0-9708275-0-4
Pages: 638