Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force
Authors:
T. Lam and R.B. Darling
Affilation:
University of Washington, U.S.A.
Pages:
418 - 421
Keywords:
stiction, cantilever beams, finite element method
Abstract:
A finite element model is combined with experimental data to extract the stiction force in MEMS cantilever beams. The model predicts cantilever behaviors both before and after snap-down has occurred. Experimental measurements of cantilevers have been performed to validate the model. With a reliable model and additional experimental data the stiction force between surfaces of MEMS devices can be extracted to predict device behavior or for process control.
