Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
 
Chapter 8: Characterizaton, Parameter Extraction, Calibration
 

Mechanical Property Measurement of Thin-film Gold Using Thermally Actuated Bimetallic Cantilever Beams

Authors:V.K. Pamula, A. Jog and R.B. Fair
Affilation:Duke University, US
Pages:410 - 413
Keywords:finite element methods, thin film, gold, Young's modulus, Poisson's ratio
Abstract:We describe a method for estimating the Young's modulus of thin-film gold deposited on the poly2 layer in the MUMPS process is described. An optical detection system employing position sensitive detectors (PSD) is built to measure the bimetallic (gold/poly2) cantilever deflection with increasing temperature. Measured cantiliver deflections are compared to finite element simulations performed with MEMCAD(TM) which show an excellent match for a Young's modulus of 78 GPa and a Poisson's ratio of 0.35.
Mechanical Property Measurement of Thin-film Gold Using Thermally Actuated Bimetallic Cantilever BeamsView PDF of paper
ISBN:0-9708275-0-4
Pages:638
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