Mechanical Property Measurement of Thin-film Gold Using Thermally Actuated Bimetallic Cantilever Beams

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 8: Characterizaton, Parameter Extraction, Calibration
	Mechanical Property Measurement of Thin-film Gold Using Thermally Actuated Bimetallic Cantilever Beams
Authors:	V.K. Pamula, A. Jog and R.B. Fair
Affilation:	Duke University, US
Pages:	410 - 413
Keywords:	finite element methods, thin film, gold, Young's modulus, Poisson's ratio
Abstract:	We describe a method for estimating the Young's modulus of thin-film gold deposited on the poly2 layer in the MUMPS process is described. An optical detection system employing position sensitive detectors (PSD) is built to measure the bimetallic (gold/poly2) cantilever deflection with increasing temperature. Measured cantiliver deflections are compared to finite element simulations performed with MEMCAD(TM) which show an excellent match for a Young's modulus of 78 GPa and a Poisson's ratio of 0.35.
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ISBN:	0-9708275-0-4
Pages:	638
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