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 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 8: Characterizaton, Parameter Extraction, Calibration |
| | Mechanical Property Measurement of Thin-film Gold Using Thermally Actuated Bimetallic Cantilever Beams | | Authors: | V.K. Pamula, A. Jog and R.B. Fair | | Affilation: | Duke University, U.S.A. | | Pages: | 410 - 413 | | Keywords: | finite element methods, thin film, gold, Young's modulus, Poisson's ratio | | Abstract: | We describe a method for estimating the Young's modulus of thin-film gold deposited on the poly2 layer in the MUMPS process is described. An optical detection system employing position sensitive detectors (PSD) is built to measure the bimetallic (gold/poly2) cantilever deflection with increasing temperature. Measured cantiliver deflections are compared to finite element simulations performed with MEMCAD(TM) which show an excellent match for a Young's modulus of 78 GPa and a Poisson's ratio of 0.35. |  | View paper | | ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
| Hardcopy: | $100.00 |
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