3-D Computational Modeling of RF MEMS Switches

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 8: Characterizaton, Parameter Extraction, Calibration
	3-D Computational Modeling of RF MEMS Switches
Authors:	H.D. Espinosa, M. Fischer, Y. Zhu and S. Lee
Affilation:	Northwestern University, US
Pages:	402 - 405
Keywords:	MEMS, computational mechanics, experimental mechanics, elasticity, radio frequency
Abstract:	Young's modulus and residual stress state of freestanding thin membranes are characterized in this work by means of wafer level experimental techniques. RF MEMS Switches manufactured by Raytheon Systems Co. are investigated using a new method that combine
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ISBN:	0-9708275-0-4
Pages:	638
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