Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 8: Characterizaton, Parameter Extraction, Calibration

Stress Measurement in MEMS Devices

Authors:L. Starman Jr., J. Busbee, J. Reber, J. Lott, W. Cowan and N. Vandelli
Affilation:Wright-Patterson AFB, US
Pages:398 - 401
Keywords:MEMS, Raman spectroscopy, residual stress, MUMPs, Young's modulus
Abstract:Due to the unique structure and small scale of Micro-Electro-Mechanical Systems (MEMS), residual stresses during the deposition processes can have a profound affect on the functionality of the MEMS structures. Typically, material properties of thin films
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