 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 8: Characterizaton, Parameter Extraction, Calibration |
| - | Predictive and Calibrated Simulation of Doping Profiles: Low Energy As, B and BF2 Ion Implantation |
| P. Scheiblin, F. Roger, D. Poncet, C. Laviron, P. Holliger, F. Laugier, E. Guichard and J.P. Caire | |
| LETI, FR | |
| - | Three-Dimensional Effects Obtained from Capacitance Analysis of an SRAM Cell |
| Y. Takemura, K. Osada, M. Yagyu, K. Yamaguchi, J. Ushio and T. Maruizumi | |
| Hitachi Ltd., JP | |
| - | Stress Measurement in MEMS Devices |
| L. Starman Jr., J. Busbee, J. Reber, J. Lott, W. Cowan and N. Vandelli | |
| Wright-Patterson AFB, US | |
| - | 3-D Computational Modeling of RF MEMS Switches |
| H.D. Espinosa, M. Fischer, Y. Zhu and S. Lee | |
| Northwestern University, US | |
| - | Parameter Extraction for Surface Micromachining Using Eelectrical Characterization of Sensors |
| M. Maute, S. Kimmerle, J. Franz, J. Hauer, D. Schubert, H.-R. Krauss and D.P. Kern | |
| Robert Bosch GmbH, DE | |
| - | Mechanical Property Measurement of Thin-film Gold Using Thermally Actuated Bimetallic Cantilever Beams |
| V.K. Pamula, A. Jog and R.B. Fair | |
| Duke University, US | |
| - | Direct Write Technology as a Tool to Rapidly Prototype Patterns of Biological and Electronic Systems |
| B.R. Ringeisen, D.B. Chrisey, A. Piqué, D. Krizman, M. Brooks and B. Spargo | |
| Naval Research Laboratory, US | |
| - | Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force |
| T. Lam and R.B. Darling | |
| University of Washington, US | |
| ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
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