Multiple Solutions in Electrostatic MEMS

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 7: Applications: MEMS, Sensors
	Multiple Solutions in Electrostatic MEMS
Authors:	J.A. Pelesko
Affilation:	Georgia Institute of Technology, US
Pages:	290 - 293
Keywords:	electrostatic actuation, pull-in, instability, semilinear elliptic problem
Abstract:	The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady s
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ISBN:	0-9708275-0-4
Pages:	638
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