Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Applications: MEMS, Sensors

Multiple Solutions in Electrostatic MEMS

Authors:J.A. Pelesko
Affilation:Georgia Institute of Technology, US
Pages:290 - 293
Keywords:electrostatic actuation, pull-in, instability, semilinear elliptic problem
Abstract:The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady s
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